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/content/aip/journal/aplmater/2/9/10.1063/1.4896051
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http://aip.metastore.ingenta.com/content/aip/journal/aplmater/2/9/10.1063/1.4896051
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/content/aip/journal/aplmater/2/9/10.1063/1.4896051
2014-09-18
2016-12-05

Abstract

Improving the conductivity of earth-abundant transparent conductive oxides (TCOs) remains an important challenge that will facilitate the replacement of indium-based TCOs. Here, we show that a hydrogen (H)-plasma post-deposition treatment improves the conductivity of amorphous aluminum-doped zinc tin oxide while retaining its low optical absorption. We found that the H-plasma treatment performed at a substrate temperature of 50 °C reduces the resistivity of the films by 57% and increases the absorptance by only 2%. Additionally, the low substrate temperature delays the known formation of tin particles with the plasma and it allows the application of the process to temperature-sensitive substrates.

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