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We report the thickness-dependent strain-relaxation behavior and the associated impacts upon the superconductivity in epitaxial LaSrCuOfilmsgrown on different substrates, which provide a range of strain. We have found that the critical thickness for the onset of superconductivity in LaSrCuOfilms is associated with the finite thickness effect and epitaxial strain. In particular, thin films with tensile strain greater than ∼0.25% revealed no superconductivity. We attribute this phenomenon to the inherent formation of oxygen vacancies that can be minimized via strain relaxation.


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