Skip to main content

News about Scitation

In December 2016 Scitation will launch with a new design, enhanced navigation and a much improved user experience.

To ensure a smooth transition, from today, we are temporarily stopping new account registration and single article purchases. If you already have an account you can continue to use the site as normal.

For help or more information please visit our FAQs.

banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
/content/aip/journal/aplmater/3/2/10.1063/1.4907954
1.
1.Y. B. Jeon, R. Sood, J. h. Jeong, and S. G. Kim, Sens. Actuators, A 122, 16 (2005).
http://dx.doi.org/10.1016/j.sna.2004.12.032
2.
2.G. L. Smith, J. S. Pulskamp, L. M. Sanchez, D. M. Potrepka, R. M. Proie, T. G. Ivanov, R. Q. Rudy, W. D. Nothwang, S. S. Bedair, C. D. Meyer, and R. G. Polcawich, J. Am. Ceram. Soc. 95, 1777 (2012).
http://dx.doi.org/10.1111/j.1551-2916.2012.05155.x
3.
3.S.-G. Kim, S. Priya, and I. Kanno, MRS Bull. 37, 1039 (2012).
http://dx.doi.org/10.1557/mrs.2012.275
4.
4.D. Newns, B. Elmegreen, X. H. Liu, and G. Martyna, J. Appl. Phys. 111, 084509 (2012).
http://dx.doi.org/10.1063/1.4704391
5.
5.A. L. Kholkin, C. Wutchrich, D. V. Taylor, and N. Setter, Rev. Sci. Instrum. 67, 1935 (1996).
http://dx.doi.org/10.1063/1.1147000
6.
6.K. Lefki and G. J. M. Dormans, J. Appl. Phys. 76, 1764 (1994).
http://dx.doi.org/10.1063/1.357693
7.
7.R. Herdier, D. Jenkins, E. Dogheche, D. Remiens, and M. Sulc, Rev. Sci. Instrum. 77, 93905 (2006).
http://dx.doi.org/10.1063/1.2349605
8.
8.Z. Wang, G. K. Lau, W. Zhu, and C. Chao, IEEE Trans. Ultrason., Ferroelectrics, Freq. Control 53, 15 (2006).
http://dx.doi.org/10.1109/TUFFC.2006.1588386
9.
9.X. Yan, W. Ren, H. Xin, P. Shi, X. Chen, and X. Wu, Ceram. Int. 39, S583 (2013).
http://dx.doi.org/10.1016/j.ceramint.2012.10.140
10.
10.G. J. T. Leighton and Z. Huang, Smart Mater. Struct. 19, 065011 (2010).
http://dx.doi.org/10.1088/0964-1726/19/6/065011
11.
11.Z. Wang and J. Miao, J. Phys. D: Appl. Phys. 41, 35306 (2008).
http://dx.doi.org/10.1088/0022-3727/41/3/035306
12.
12.P. Gerber, A. Roelofs, C. Kugeler, U. Bottger, R. Waser, and K. Prume, J. Appl. Phys. 96, 2800 (2004).
http://dx.doi.org/10.1063/1.1775306
13.
13.S. Sivaramakrishnan, P. Mardilovich, A. Mason, A. Roelofs, T. Schmitz-Kempen, and S. Tiedke, Appl. Phys. Lett. 103, 132904 (2013).
http://dx.doi.org/10.1063/1.4821948
14.
14.L. N. McCartney, L. Wright, M. G. Cain, J. Crain, G. J. Martyna, and D. M. Newns, J. Appl. Phys. 116, 014104 (2014).
http://dx.doi.org/10.1063/1.4885058
15.
15.See supplementary material at http://dx.doi.org/10.1063/1.4907954 for FEA showing the equivalence of piezoelectric and contact mechanics simulations and the independence of the step height on boundary conditions and electrode size.[Supplementary Material]
16.
16.K. L. Johnson, Contact Mechanics (CUP, 1985).
http://aip.metastore.ingenta.com/content/aip/journal/aplmater/3/2/10.1063/1.4907954
Loading
/content/aip/journal/aplmater/3/2/10.1063/1.4907954
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/aplmater/3/2/10.1063/1.4907954
2015-02-10
2016-12-05

Abstract

The determination of the piezoelectric coefficient of thin films using interferometry is hindered by bending contributions. Using finite element analysis (FEA) simulations, we show that the Lefki and Dormans approximations using either single or double-beam measurements cannot be used with finite top electrode sizes. We introduce a novel method for characterising piezoelectric thin films which uses a differential measurement over the discontinuity at the electrode edge as an internal reference, thereby eliminating bending contributions. This step height is shown to be electrode size and boundary condition independent. An analytical expression is derived which gives good agreement with FEA predictions of the step height.

Loading

Full text loading...

/deliver/fulltext/aip/journal/aplmater/3/2/1.4907954.html;jsessionid=Za0vPh_LulGq6KfTEPHmusvd.x-aip-live-06?itemId=/content/aip/journal/aplmater/3/2/10.1063/1.4907954&mimeType=html&fmt=ahah&containerItemId=content/aip/journal/aplmater
true
true

Access Key

  • FFree Content
  • OAOpen Access Content
  • SSubscribed Content
  • TFree Trial Content
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
/content/realmedia?fmt=ahah&adPositionList=
&advertTargetUrl=//oascentral.aip.org/RealMedia/ads/&sitePageValue=APLMaterials.aip.org/3/2/10.1063/1.4907954&pageURL=http://scitation.aip.org/content/aip/journal/aplmater/3/2/10.1063/1.4907954'
Top,Right1,Right2,Right3,