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Electron tomography of (In,Ga)N insertions in GaN nanocolumns grown on semi-polar (
) GaN templates
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16. The selected intensity value can only represent (In,Ga)N with one fixed indium concentration. We have chosen in Fig. 3 a value that visualizes (In,Ga)N with the lowest detectable indium content. Abrupt intensity changes at interfaces in STEM images are slightly smeared out in the reconstructed 3D data set.17 As a consequence, the shape of regions with higher indium content compared to the selected value is, therefore, inherently included in the isosurface representation.
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We present results of scanning transmission electron tomography on GaN/(In,Ga)N/GaN nanocolumns (NCs) that grew uniformly inclined towards the patterned, semi-polar GaN(
) substrate surface by molecular beam epitaxy. For the practical realization of the tomographic experiment, the nanocolumn axis has been aligned parallel to the rotation axis of the electron microscope goniometer. The tomographic reconstruction allows for the determination of the three-dimensional indium distribution inside the nanocolumns. This distribution is strongly interrelated with the nanocolumn morphology and faceting. The (In,Ga)N layer thickness and the indium concentration differ between crystallographically equivalent and non-equivalent facets. The largest thickness and the highest indium concentration are found at the nanocolumn apex parallel to the basal planes.
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