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/content/aip/journal/aplmater/4/9/10.1063/1.4963154
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/content/aip/journal/aplmater/4/9/10.1063/1.4963154
2016-09-20
2016-12-08

Abstract

We report the significant increase in the electrical conductivity, by five orders of magnitude, of Re-doped -MoO epitaxial films grown using reactive DC magnetron sputtering. Re atoms were successfully incorporated into the films by using Mo-Re alloy targets, although the film compositions deviated significantly from those of the targets. Pristine -MoO exhibited a conductivity below 10−7 S/cm, whereas -MoReO exhibited a conductivity of 1.2 × 10−2 S/cm and a high optical transmittance of 67% (average) in the visible region. Furthermore, transparent conducting properties were reproduced in a polycrystalline film grown on a glass substrate, indicating the high potential of these films for use as transparent conductors.

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