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Thin film electro-osmotic pumps for biomicrofluidic applications
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Figures

Image of FIG. 1.

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FIG. 1.

Illustrations of EOF pumps consisting of (top) a single channel and (bottom) a single channel with multiple pump arms. Both have equal total cross-sectional areas.

Image of FIG. 2.

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FIG. 2.

Plot of the ratio of fluid flows of multiple channel EOF pump to single channel EOF pump of equal cross-sectional area, as a function of pump segment length . The total length , such that as becomes longer, becomes shorter. This ratio is shown for several numbers of pump arms.

Image of FIG. 3.

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FIG. 3.

Fabrication process for creating thin film microchannels.

Image of FIG. 4.

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FIG. 4.

SEM images of EOF pump features. (a) Cross-sectional view of a EOF channel. (b) Cross-sectional view of a flow channel. (c) Top view of the pump channels interfaced with the flow channel.

Image of FIG. 5.

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FIG. 5.

Schematic of the experimental setup for testing thin film EOF pumps.

Image of FIG. 6.

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FIG. 6.

Plot of flow rate vs applied electric field for multiple channel EOF pumps and single channel EOF pumps fabricated on silicon and glass substrates.

Image of FIG. 7.

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FIG. 7.

Expanded view of the flow rates generated in single channel EOF pumps.

Image of FIG. 8.

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FIG. 8.

Plot of efficiency of an EOF pump system having EOF pump channels that are long. The pump channels are attached to a long, wide single channel.

Image of FIG. 9.

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FIG. 9.

Schematic of three different pump configurations of equal area. The configurations differ by length-to-width ratios of 1:1, 4:1, and 1:4. Mechanical power increases with pump width. For these calculations, the pump arms were tall and wide.

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/content/aip/journal/bmf/1/1/10.1063/1.2372215
2006-11-07
2014-04-18

Abstract

Electro-osmotic flow(EOF) pumps are attractive for fluid manipulation in microfluidic channels. Open channel EOF pumps can produce high pressures and flow rates, and are relatively easy to fabricate on-chip or integrate with other microfluidic or electrical components. An EOF pump design that is conducive to on-chip fabrication consists of multiple small channel arms feeding into a larger flow channel. We have fabricated this type of pump design using a thin film deposition process that avoids wafer bonding. We have evaluated pumps fabricated on both silicon and glass substrates. Consistent flow rate versus electric field were obtained. For the range of , flow rates of were measured. Theoretical calculations of pump efficiency were made, as well as calculations of the mechanical power generated by various pump shapes, to investigate design parameters that should improve future pumps.

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Scitation: Thin film electro-osmotic pumps for biomicrofluidic applications
http://aip.metastore.ingenta.com/content/aip/journal/bmf/1/1/10.1063/1.2372215
10.1063/1.2372215
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