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Electrodes on a budget: Micropatterned electrode fabrication by wet chemical deposition
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Figures

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FIG. 1.

Schematic diagram of micropatterning electrodes. Freshly prepared solution is dropped uniformly over a glass substrate until the surface is entirely covered. Glucose solution is dropped uniformly over the substrate, and the substrate is gently agitated to allow even mixing of the solutions. Deposition is complete within 3 min. After agitation for 5 min, the deposition solution is rinsed off with water. Deposition is repeated once again to achieve an even coating. The substrate is dehydrated on a hotplate, and standard photolithography methods are used to pattern positive photoresist over the silver coating. The unprotected silver is etched away by sonicating in a diluted 1:1 (v/v) . Finally, the remaining photoresist is dissolved away with acetone to reveal the patterned silver.

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FIG. 2.

Thickness of silver film depends on number of layers deposited. We control the electrode height by varying the number of layers deposited. The height of a polished, deposited silver film is measured by profilometry. Error bars represent standard deviation of at least three independent measurements.

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FIG. 3.

Wet-deposited silver films sustain micropatterning of micron-scale features. By patterning with photoresist and subsequently etching, electrodes with the desired geometry are fabricated as shown in these images. Note the micron-scale features that can be achieved. (a) Micropatterning after one deposition cycle; [(b) and (c)] micropatterning after three deposition cycles. Scale: .

Tables

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Table I.

Surface electrical resistance. Resistance is measured with multimeter electrodes spaced 1 cm apart. ITO rated at is rated at . Reported values are the average of at least ten measurements with standard deviation.

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/content/aip/journal/bmf/3/3/10.1063/1.3224669
2009-09-08
2014-04-16

Abstract

Precise patterning of metals is required for diverse microfluidic and microelectromechanical system(MEMS) applications ranging from the separation of proteins to the manipulation of single cells and drops of water-in-oil emulsions. Here we present a very simple, inexpensive method for fabricating micropatterned electrodes. We deposit a thin metal layer of controlled thickness using wet chemistry, thus eliminating the need for expensive equipment typically required for metal deposition. We demonstrate that the resulting deposited metal can be used to fabricate functional electrodes: The wet-deposited metal film can sustain patterning by photolithography down to micron-sized features required for MEMS and microfluidic applications, and its properties are suitable for operative electrodes used in a wide range of microfluidic applications for biological studies.

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Scitation: Electrodes on a budget: Micropatterned electrode fabrication by wet chemical deposition
http://aip.metastore.ingenta.com/content/aip/journal/bmf/3/3/10.1063/1.3224669
10.1063/1.3224669
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