Fabrication process of multi-layer polymeric micro-sieve, (a) spin coating of sacrificial layer on the Si substrate, (b) spin coating of first layer of SU-8, (c) exposure through the first quartz mask (i.e., dark brown areas are exposed area), (d) spin coating of second layer of SU-8, (e) exposure through the second quartz mask (i.e., dark brown areas are exposed area), (f) spin coating of third layer of SU-8, (g) exposure through the foil mask (i.e., dark brown areas are exposed area), and (h) simultaneous development of all three layers and release of membrane from the Si substrate by dissolving the sacrificial layer.
(a) Schematic and (b) optical image of a multi-layer polymeric micro-sieve with critical dimensions.
SEM image of a polymeric multi-layer micro-sieve with integrated back-support. Close-up view shows the perforated micro-sieve.
Back-side view of a polymeric multi-layer micro-sieve with slit-shape openings (3 × 12 μm) and integrated support mesh.
Pore size distribution of a polymeric multi-layer micro-sieve with 3 × 12 μm slit-shape perforations.
The filtration throughput of the polymeric multi-layer micro-sieve and a track-etched membrane for filtration of tap-water at the pressure of 0.5 bar and turbidity of 0.4 NTU.
Fluorescence microscopic image of the trapped C. parvum oocysts on the surfaces of a multi-layer polymeric micro-sieve after filtration of 10 l of sample (pure water spiked with 2 × 103 heat inactivated C. parvum oocysts).
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