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Fabrication of multi-layer polymeric micro-sieve having narrow slot pores with conventional ultraviolet-lithography and micro-fabrication techniques
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10.1063/1.3637630
/content/aip/journal/bmf/5/3/10.1063/1.3637630
http://aip.metastore.ingenta.com/content/aip/journal/bmf/5/3/10.1063/1.3637630
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Figures

Image of FIG. 1.
FIG. 1.

Fabrication process of multi-layer polymeric micro-sieve, (a) spin coating of sacrificial layer on the Si substrate, (b) spin coating of first layer of SU-8, (c) exposure through the first quartz mask (i.e., dark brown areas are exposed area), (d) spin coating of second layer of SU-8, (e) exposure through the second quartz mask (i.e., dark brown areas are exposed area), (f) spin coating of third layer of SU-8, (g) exposure through the foil mask (i.e., dark brown areas are exposed area), and (h) simultaneous development of all three layers and release of membrane from the Si substrate by dissolving the sacrificial layer.

Image of FIG. 2.
FIG. 2.

(a) Schematic and (b) optical image of a multi-layer polymeric micro-sieve with critical dimensions.

Image of FIG. 3.
FIG. 3.

SEM image of a polymeric multi-layer micro-sieve with integrated back-support. Close-up view shows the perforated micro-sieve.

Image of FIG. 4.
FIG. 4.

Back-side view of a polymeric multi-layer micro-sieve with slit-shape openings (3 × 12 μm) and integrated support mesh.

Image of FIG. 5.
FIG. 5.

Pore size distribution of a polymeric multi-layer micro-sieve with 3 × 12 μm slit-shape perforations.

Image of FIG. 6.
FIG. 6.

The filtration throughput of the polymeric multi-layer micro-sieve and a track-etched membrane for filtration of tap-water at the pressure of 0.5 bar and turbidity of 0.4 NTU.

Image of FIG. 7.
FIG. 7.

Fluorescence microscopic image of the trapped C. parvum oocysts on the surfaces of a multi-layer polymeric micro-sieve after filtration of 10 l of sample (pure water spiked with 2 × 103 heat inactivated C. parvum oocysts).

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/content/aip/journal/bmf/5/3/10.1063/1.3637630
2011-09-30
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of multi-layer polymeric micro-sieve having narrow slot pores with conventional ultraviolet-lithography and micro-fabrication techniques
http://aip.metastore.ingenta.com/content/aip/journal/bmf/5/3/10.1063/1.3637630
10.1063/1.3637630
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