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ASECA: A cellular-automata simulation program for a silicon anisotropic super-micro-etching process in aqueous KOH
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1998-01-01
2014-12-25
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Scitation: ASECA: A cellular-automata simulation program for a silicon anisotropic super-micro-etching process in aqueous KOH
http://aip.metastore.ingenta.com/content/aip/journal/cip/12/1/10.1063/1.168640
10.1063/1.168640
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