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Applications of Raman spectroscopy in copper chemical mechanical planarization: In situ detection of tantalum layer to dielectric layer transition
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10.1063/1.2212087
/content/aip/journal/jap/100/1/10.1063/1.2212087
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/1/10.1063/1.2212087
/content/aip/journal/jap/100/1/10.1063/1.2212087
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/content/aip/journal/jap/100/1/10.1063/1.2212087
2006-07-11
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Applications of Raman spectroscopy in copper chemical mechanical planarization: In situ detection of tantalum layer to dielectric layer transition
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/1/10.1063/1.2212087
10.1063/1.2212087
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