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Nano- and microscale adhesion energy measurement for Au–Au contacts in microswitch structures
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10.1063/1.2388688
/content/aip/journal/jap/100/10/10.1063/1.2388688
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/10/10.1063/1.2388688

Figures

Image of FIG. 1.
FIG. 1.

(a) S-shaped beams are attached over a long length . (b) Arc-shaped beams are attached only very near their tips, see Ref. 6.

Image of FIG. 2.
FIG. 2.

Typical total energy curve, see Ref. 4.

Image of FIG. 3.
FIG. 3.

(Color online) Au microswitch cross section.

Image of FIG. 4.
FIG. 4.

(Color online) Au microswitch top view.

Image of FIG. 5.
FIG. 5.

(Color online) AFM images of surfaces in contact: (a) Au substrate surface topology and (b) Au beam bottom surface topology.

Image of FIG. 6.
FIG. 6.

SEM images of surfaces in contact: (a) Au substrate surface and (b) Au beam bottom surface.

Image of FIG. 7.
FIG. 7.

SEM measurements of detachment length: (a) totally released beam and one arc-shaped beam, (b) S-shaped beam, and (c) most adhered in S-shaped beams.

Image of FIG. 8.
FIG. 8.

Au-coated AFM tip with tip radius of .

Image of FIG. 9.
FIG. 9.

(Color online) Cross-sectional topology of the beam bottom surface.

Image of FIG. 10.
FIG. 10.

(Color online) FEM simulated AFM probe cantilever deflection due to self-weight.

Image of FIG. 11.
FIG. 11.

(Color online) FEM simulated beam deflection due to displacement constraint. (, etc.)

Image of FIG. 12.
FIG. 12.

(Color online) Young’s modulus measurements for Au beams.

Image of FIG. 13.
FIG. 13.

(Color online) Detachment length measurements for S-shaped beams.

Image of FIG. 14.
FIG. 14.

(Color online) Adhesion energy obtained from S-shaped beams.

Image of FIG. 15.
FIG. 15.

(Color online) Typical force-displacement curve obtained from AFM adhesion experiment.

Image of FIG. 16.
FIG. 16.

(Color online) Finite element method is used to determine the crack mode mixity (, etc.).

Image of FIG. 17.
FIG. 17.

The models used to simulate effects of crack shielding, see Ref. 25. (a) Single role model and (b) zone model.

Image of FIG. 18.
FIG. 18.

(Color online) Variation of shielding vs attachment length, , for single row and zone models.

Tables

Generic image for table
Table I.

Adhesion energy measurements from S-shaped beams.

Generic image for table
Table II.

Adhesion energy measurements from arc-shaped beams.

Generic image for table
Table III.

Nondimensional transition parameter calculation.

Generic image for table
Table IV.

Adhesion energy corrected for crack shielding effects.

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/content/aip/journal/jap/100/10/10.1063/1.2388688
2006-11-21
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nano- and microscale adhesion energy measurement for Au–Au contacts in microswitch structures
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/10/10.1063/1.2388688
10.1063/1.2388688
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