AFM micrographs of (a) 30, (b) 40, (c) 50, and (d) 70 cycles of the films deposited on . The scale is magnified five times to increase the vertical contrast.
Modeled and experimental XRF W yields vs cycles for the films deposited on (∎), and (●) and rms height fluctuation (nm) vs cycles for the films deposited on (◻) and (엯).
plots of the rms height fluctuation (nm) vs scale length (nm) (엯) and one dimension power spectral density (1D PSD), (●) for the film deposited on .
(a) values vs cycles for the films deposited on as extracted from the rms height fluctuation vs plot (▴) and from the 1D PSD spectra (▵) (b) values vs cycles for the films deposited on (◻) and (∎).
Modeled (—) and experimental (●) Hf yields vs cycles and values vs cycles (∎) for the films deposited on hydrogen-terminated silicon substrates.
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