1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Using scaling laws to understand the growth mechanism of atomic layer deposited films on methyl-terminated surfaces
Rent:
Rent this article for
USD
10.1063/1.2363241
/content/aip/journal/jap/100/11/10.1063/1.2363241
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/11/10.1063/1.2363241
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

AFM micrographs of (a) 30, (b) 40, (c) 50, and (d) 70 cycles of the films deposited on . The scale is magnified five times to increase the vertical contrast.

Image of FIG. 2.
FIG. 2.

Modeled and experimental XRF W yields vs cycles for the films deposited on (∎), and (●) and rms height fluctuation (nm) vs cycles for the films deposited on (◻) and (엯).

Image of FIG. 3.
FIG. 3.

plots of the rms height fluctuation (nm) vs scale length (nm) (엯) and one dimension power spectral density (1D PSD), (●) for the film deposited on .

Image of FIG. 4.
FIG. 4.

(a) values vs cycles for the films deposited on as extracted from the rms height fluctuation vs plot (▴) and from the 1D PSD spectra (▵) (b) values vs cycles for the films deposited on (◻) and (∎).

Image of FIG. 5.
FIG. 5.

Modeled (—) and experimental (●) Hf yields vs cycles and values vs cycles (∎) for the films deposited on hydrogen-terminated silicon substrates.

Loading

Article metrics loading...

/content/aip/journal/jap/100/11/10.1063/1.2363241
2006-12-01
2014-04-16
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Using scaling laws to understand the growth mechanism of atomic layer deposited WNxCy films on methyl-terminated surfaces
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/11/10.1063/1.2363241
10.1063/1.2363241
SEARCH_EXPAND_ITEM