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Controlled in situ boron doping of diamond thin films using solution phase
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10.1063/1.2400806
/content/aip/journal/jap/100/12/10.1063/1.2400806
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/12/10.1063/1.2400806

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of the bubbler.

Image of FIG. 2.
FIG. 2.

XPS survey spectrum of the sample grown with . Insets: main core levels and XPS spectra with their deconvoluted features.

Image of FIG. 3.
FIG. 3.

Plot of absolute boron concentration as a function of the corresponding molarities of in .

Image of FIG. 4.
FIG. 4.

Raman spectra of samples doped with different molarities of .

Image of FIG. 5.
FIG. 5.

A typical Raman spectrum fitted with a pair of Gaussian and Lorentzian line shapes. Inset: depth profile of the estimated boron concentration along the film thickness.

Image of FIG. 6.
FIG. 6.

Microphotoluminescence spectra of samples doped with different molarities of .

Image of FIG. 7.
FIG. 7.

XRD pattern of a typical sample doped with . Inset: plot of mean lattice constant as a function of absolute boron concentration in the samples.

Image of FIG. 8.
FIG. 8.

SEM micrograph of samples doped with and .

Image of FIG. 9.
FIG. 9.

Variation of sheet resistance and carrier concentration of samples as a function of ratio.

Image of FIG. 10.
FIG. 10.

Plot of logarithm of conductivity vs temperature for (a) lightly doped and (b) heavily doped diamond thin film samples.

Tables

Generic image for table
Table I.

Deposition parameters used for sample preparation.

Generic image for table
Table II.

B:C ratio for samples grown with different molarities of .

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/content/aip/journal/jap/100/12/10.1063/1.2400806
2006-12-20
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Controlled in situ boron doping of diamond thin films using solution phase
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/12/10.1063/1.2400806
10.1063/1.2400806
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