1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Magnetic field effects on secondary electron emission during ion implantation in a nitrogen plasma
Rent:
Rent this article for
USD
10.1063/1.2201695
/content/aip/journal/jap/100/3/10.1063/1.2201695
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/3/10.1063/1.2201695
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematics of the dc glow discharge system with magnetic field coils, PIII electrode, and Faraday cups (not to scale).

Image of FIG. 2.
FIG. 2.

Density profiles measured with a double probe of plasmas with (a) , and and (b) , , and , . Radial distances are measured from the surface of one of the electrode’s faces ( is radially from the vessel axis).

Image of FIG. 3.
FIG. 3.

Temporal evolution of the transversal (Trans) and longitudinal (Long) Faraday cup currents, the high voltage at the target sample (HV), and the current measured by a Rogowskii coil (Rog) for unmagnetized plasmas.

Image of FIG. 4.
FIG. 4.

Temporal evolution of the longitudinal and transversal Faraday cup currents (units in ) for plasmas with , , and . The high voltage applied to the electrode was about in all cases.

Image of FIG. 5.
FIG. 5.

Amplitude of negative current spikes (from average baseline during high voltage pause to negative peak value during pulses) in the transversal Faraday cup for high voltages from as a function of magnetic field.

Image of FIG. 6.
FIG. 6.

Amplitude of negative current spikes (from average baseline during high voltage pause to negative peak value during pulses) in the longitudinal Faraday cup as a function of magnetic field for high voltages from .

Image of FIG. 7.
FIG. 7.

Amplitude of negative current spikes in the transversal (open symbols) and longitudinal (solid symbols) Faraday cups as a function of magnetic field for high voltages of and .

Loading

Article metrics loading...

/content/aip/journal/jap/100/3/10.1063/1.2201695
2006-08-01
2014-04-17
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Magnetic field effects on secondary electron emission during ion implantation in a nitrogen plasma
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/3/10.1063/1.2201695
10.1063/1.2201695
SEARCH_EXPAND_ITEM