Experimental setup for the second harmonic (SH) microscopy.
Raman spectra of the Si phonon band of (a) nondoped and [(b) and (c)] As-doped areas. The areas , , and are defined in Fig. 3(i). The shadowed parts in the spectra of (b) and (c) represent the contribution of amorphous structure.
SH intensity images of an As-doped Si substrate at the SH photon energy from . The white dots represents the observed SH photons. The doped pattern is illustrated in (i).
Linear optical reflection images of an As-doped Si substrate at the incident photon energy from . The reflectivity is high where the image is bright.
SH intensity as a function of the SH photon energy for nondoped area (circle) and As-doped areas (triangle) and (cross). The areas , , and are defined in Fig. 3(i). The SH intensity of the As-doped area (triangle) is magnified to 20 times the original intensity. Dashed line and gray and black solid lines are guides to the eyes.
Linear optical reflectivity as a function of the wavelength for nondoped area (dashed line), As-doped areas (gray solid line), and (black solid line). The areas , , and are defined in Fig. 3(i).
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