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High resolution x-ray diffraction analysis of superlattices
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Image of FIG. 1.
FIG. 1.

Measured HRXRD (004) rocking curves. The measured SL period is indicated for each rocking curve in units of angstroms. Satellite orders are labeled, and the curves are offset for visual clarity.

Image of FIG. 2.
FIG. 2.

Zero-order peak splitting vs superlattice period for measured (triangles) and simulated (solid line) data.

Image of FIG. 3.
FIG. 3.

Structural model for (a) interface 1 (InGaAs on InP) and (b) interface 2 (InP on InGaAs).

Image of FIG. 4.
FIG. 4.

Interface layers of a perfect SL structure.

Image of FIG. 5.
FIG. 5.

Simulated HRXRD rocking curves of the SL structure illustrated in Fig. 4. The measured SL period is indicated for each rocking curve in units of angstroms.

Image of FIG. 6.
FIG. 6.

Measured and simulated (004) HRXRD rocking curves for the rocking curve.

Image of FIG. 7.
FIG. 7.

Comparison of peak intensities for samples of period (a) , (b) , (c) , and (d) for each of the models. The solid lines represent the 2-1 (thick line) and 2-2 (thin line) models, and the dashed lines represent the 1-1 (thick dashed) and 1-2 (thin dashed) models. The experimental peak intensities are shown as square data points.

Image of FIG. 8.
FIG. 8.

Experimental and simulated rocking curves using the same model and interface layer compositions (, , , and ) for each sample. The curves are shown offset for visual clarity with the experimental curve above the simulated curve for each sample. The measured SL period is indicated for each sample in units of angstroms.

Image of FIG. 9.
FIG. 9.

Measured (triangles) and simulated (solid lines) FWHM of the satellite peak for each sample. Simulated lines based on 0, 2, and 4 ML of interface roughness are shown.


Generic image for table
Table I.

Simulation results for the 2-1 model. Note that is fixed at 1.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High resolution x-ray diffraction analysis of InGaAs∕InP superlattices