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Extraction of Cu diffusivities in dielectric materials by numerical calculation and capacitance-voltage measurement
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10.1063/1.2353891
/content/aip/journal/jap/100/6/10.1063/1.2353891
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/6/10.1063/1.2353891
/content/aip/journal/jap/100/6/10.1063/1.2353891
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/content/aip/journal/jap/100/6/10.1063/1.2353891
2006-09-26
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Extraction of Cu diffusivities in dielectric materials by numerical calculation and capacitance-voltage measurement
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/6/10.1063/1.2353891
10.1063/1.2353891
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