1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Kinetic simulation of an extreme ultraviolet radiation driven plasma near a multilayer mirror
Rent:
Rent this article for
USD
10.1063/1.2356085
/content/aip/journal/jap/100/7/10.1063/1.2356085
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/7/10.1063/1.2356085

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Particle-in-cell scheme.

Image of FIG. 2.
FIG. 2.

(Color online) Schematic of the geometry used in calculations. The EUV radiation is partially reflected by the mirror. The EUV radiation between the mirror on the left and a plain wall on the right is assumed to be monochromatic and homogeneous in intensity. Photoelectrons are only emitted from the surface of the mirror.

Image of FIG. 3.
FIG. 3.

(Color online) Energy distribution of secondary photoelectrons emitted from the mirror [Eq. (4)].

Image of FIG. 4.
FIG. 4.

Plasma density profile near the mirror at , , and . The thick lines show the electron density, whereas thin lines indicate the effective ion density . Three cases are shown: (a) no photoeffect, (b) primary photoelectrons, and (c) secondary photoelectrons.

Image of FIG. 5.
FIG. 5.

(Color online) Cell-averaged electron energy at different times for three cases: (a) no photoeffect, (b) primary photoelectrons, and (c) secondary photoelectrons.

Image of FIG. 6.
FIG. 6.

(Color online) Potential profile at different times for three cases: (a) no photoeffect, (b) primary photoelectrons, and (c) secondary photoelectrons.

Image of FIG. 7.
FIG. 7.

(Color online) The solid lines show the energies of (a) singly and (b) doubly charged argon ions that have impacted on the mirror as a function of time. For clarity, the depicted energy is the moving average over 50 consecutive ion impacts. The horizontal line indicates the sputter threshold of Yamamura and Tawara. The dashed line in (a) shows the temporal behavior of the EUV intensity in arbitrary units.

Image of FIG. 8.
FIG. 8.

(Color online) (a) Sputter yield as a function of ion energy for the model of Yamamura and Tawara. (b) The amount of removed mirror material in units of EUV pulses as a result of physical sputtering by and ions for the case of no photoeffect, primary photoelectrons, and secondary photoelectrons.

Tables

Generic image for table
Table I.

Simulation parameters.

Loading

Article metrics loading...

/content/aip/journal/jap/100/7/10.1063/1.2356085
2006-10-06
2014-04-21
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Kinetic simulation of an extreme ultraviolet radiation driven plasma near a multilayer mirror
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/7/10.1063/1.2356085
10.1063/1.2356085
SEARCH_EXPAND_ITEM