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Ablation of crystalline oxides by infrared femtosecond laser pulses
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10.1063/1.2358001
/content/aip/journal/jap/100/8/10.1063/1.2358001
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/8/10.1063/1.2358001
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Diameter of the ablation craters as a function of the energy of the laser pulse: (a) ablation by a single laser pulse for five single-crystal oxides and (b) ablation of MgO and sapphire by 1, 100, and laser pulses. In both (a) and (b), the measured diameters of ablation craters are shown as data symbols and the lines show a fit to the data by an equation of the form used to determine the threshold fluence for ablation where is the radius of the focused laser spot and is the total pulse energy at the threshold of ablation. Each curve in (a) is labeled by this fitted value for the threshold fluence.

Image of FIG. 2.
FIG. 2.

Depth of ablation craters as a function of the difference between the peak laser fluence at the center of the laser and the threshold fluence for ablation, see also Fig. 1. Data points are for sapphire (solid circle), (solid triangle pointed up), (solid triangle pointed down), yttria-stabilized (solid diamond), and MgO (cross). The lines are added to “guide the eyes.”

Image of FIG. 3.
FIG. 3.

Example of an ablation crater on sapphire at a peak fluence of above the threshold fluence for ablation , i.e., . (a) An “amplitude image” of the crater acquired during tapping mode in the AFM. This image is approximately a gray-scale representation of the derivative of the surface profile taken from right to left. (b) AFM image of the same crater with the gray-scale keyed to the surface height. (c) Surface heights measured along the path shown as the dotted line in (b).

Image of FIG. 4.
FIG. 4.

AFM amplitude image of a part of an ablation crater on sapphire showing three characteristic regions of morphology marked by the circles A (shallow and rough), B (medium depth and smooth), and C (deep and rough); the laser fluence at the center of the crater is larger than the threshold for ablation , i.e., .

Image of FIG. 5.
FIG. 5.

Example of an ablation crater on MgO at a peak fluence of above the threshold fluence for ablation; , i.e., . (a) An “amplitude image” of the crater acquired during tapping mode in the AFM. This image is approximately a gray-scale representation of the derivative of the surface profile measured from right to left. (b) AFM image of the same crater with the gray-scale keyed to the surface height. (c) Surface heights measured along the path shown as the dotted line in (b).

Image of FIG. 6.
FIG. 6.

Root-mean-square (rms) roughness of ablation craters on (a) sapphire and (b) MgO measured in regions plotted as a function of the amount by which the laser fluence at the center of the ablation crater exceeds the threshold for ablation; data points measured at the centers of the ablation craters are shown as triangles, and data points measured near the edges of the ablation craters are shown as squares.

Image of FIG. 7.
FIG. 7.

AFM amplitude images for (a) at , , (b) at , , and (c) at , .

Image of FIG. 8.
FIG. 8.

AFM height image of a sapphire ablation crater at () showing that atomic steps run continuously through the crater. The image has been filtered to remove the nanoscale particulates that are formed by the ablation process. The depth at the center of this ablation crater is .

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/content/aip/journal/jap/100/8/10.1063/1.2358001
2006-10-27
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ablation of crystalline oxides by infrared femtosecond laser pulses
http://aip.metastore.ingenta.com/content/aip/journal/jap/100/8/10.1063/1.2358001
10.1063/1.2358001
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