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High-frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithography
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10.1063/1.2739218
/content/aip/journal/jap/101/11/10.1063/1.2739218
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/11/10.1063/1.2739218
/content/aip/journal/jap/101/11/10.1063/1.2739218
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/content/aip/journal/jap/101/11/10.1063/1.2739218
2007-06-12
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithography
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/11/10.1063/1.2739218
10.1063/1.2739218
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