X-ray diffraction of AlN/diamond layered structure.
Rocking curve of (002) AlN film orientation indicating a FWHM value of .
Plane view of transmission electron microscope image shows the microstructure and grain size of AlN thin film.
Atomic force microscope 3D image of AlN film surface exhibiting very low roughness.
Frequency response of SAW device based on AlN/diamond layered structure with 250 nm IDTs lateral resolution. Inset, the SAW device frequency response achieved with 500 nm IDTs lateral resolution.
Experimental (dots) and calculated (lines) phase velocity dispersion curve relative to achieved SAW devices.
Experimental (black dots) and calculated (dashed line) electromechanical coupling coefficient dispersion curves of realized SAW devices.
Experimental dispersion curve of temperature coefficient of frequency determined in the range of .
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