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Effect of composition on the thermal stability of sputter deposited hafnium aluminate and nitrided hafnium aluminate dielectrics on Si (100)
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10.1063/1.2743818
/content/aip/journal/jap/101/11/10.1063/1.2743818
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/11/10.1063/1.2743818
/content/aip/journal/jap/101/11/10.1063/1.2743818
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/content/aip/journal/jap/101/11/10.1063/1.2743818
2007-06-14
2014-12-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of composition on the thermal stability of sputter deposited hafnium aluminate and nitrided hafnium aluminate dielectrics on Si (100)
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/11/10.1063/1.2743818
10.1063/1.2743818
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