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Fixed charge density in dielectrics deposited on using space charge region dominated lifetime measurements
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10.1063/1.2748355
/content/aip/journal/jap/101/12/10.1063/1.2748355
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/12/10.1063/1.2748355

Figures

Image of FIG. 1.
FIG. 1.

Example simulations for (a) positive and (b) negative values. Solid and dashed lines indicate the model with and without DRM effect, respectively. The rest of parameters are , , , and .

Image of FIG. 2.
FIG. 2.

Example simulations varying . Solid and dashed lines indicate the model with and without DRM effect, respectively. The rest of the parameters are , , , and .

Image of FIG. 3.
FIG. 3.

Example simulations varying . The thicknesses used are, in the direction of the arrow, 50, 100, 200, 300, and . Solid and dashed lines indicate the model with and without DRM effect, respectively. The rest of the parameters are , , , and .

Image of FIG. 4.
FIG. 4.

Example simulations varying the surface mobility of electrons. The values used are, in the direction of the arrow, 100, 250, 500, and . Solid and dashed lines indicate the model with and without DRM effect respectively. The rest of the parameters are , , , , and .

Image of FIG. 5.
FIG. 5.

Experimental (symbols) and fitted (lines) curves of wafers with different passivated by films. The resulting interface parameters are shown in Table I.

Image of FIG. 6.
FIG. 6.

Experimental (symbols) and fitted curves with surface (solid line) and surface (dashed line) of the measurement shown in Fig. 5 and labeled as . The inset figure represents the value obtained from the best fit as a function of surface .

Image of FIG. 7.
FIG. 7.

Experimental (symbols) and fitted (lines) curves of three identical passivated wafers with different thicknesses, . All curves are fitted using and and considering a surface .

Image of FIG. 8.
FIG. 8.

(Color online) Contour plots of the logarithm of the fitting error for the measurement shown in Fig. 5 and labeled as , using the model without (a) and with (b) DRM effect.

Tables

Generic image for table
Table I.

Interface parameters determined by fitting the experimental data shown in Fig. 5.

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/content/aip/journal/jap/101/12/10.1063/1.2748355
2007-06-29
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fixed charge density in dielectrics deposited on c-Si using space charge region dominated lifetime measurements
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/12/10.1063/1.2748355
10.1063/1.2748355
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