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Reduction of the residual compressive stress of tetrahedral amorphous carbon film by Ar background gas during the filtered vacuum arc process
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10.1063/1.2408385
/content/aip/journal/jap/101/2/10.1063/1.2408385
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/2/10.1063/1.2408385
/content/aip/journal/jap/101/2/10.1063/1.2408385
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/content/aip/journal/jap/101/2/10.1063/1.2408385
2007-01-17
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reduction of the residual compressive stress of tetrahedral amorphous carbon film by Ar background gas during the filtered vacuum arc process
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/2/10.1063/1.2408385
10.1063/1.2408385
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