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rf magnetron sputter deposition of transparent conducting Nb-doped films on
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10.1063/1.2434005
/content/aip/journal/jap/101/3/10.1063/1.2434005
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/3/10.1063/1.2434005
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Figures

Image of FIG. 1.
FIG. 1.

Electrical and structural properties of Nb-doped films deposited on STO at various temperatures: (a) conductivity , (b) carrier concentration , and (c) Hall mobility . (d) Maximum intensity of anatase (004) XRD peak and (e) FWHM of anatase (004) XRD peak.

Image of FIG. 2.
FIG. 2.

Top: XRD spectra of Nb-doped and Ta-doped on STO at varying deposition temperatures. Middle: Anatase x-ray powder diffraction pattern (JCPDS 21-1272). Bottom: Rutile x-ray powder diffraction pattern (JCPDS 21-1276). Insets: Pole figures taken at for a bare STO substrate (lower) and for a film on STO (upper). Upper right inset: spectra for Ta- and Nb-doped on STO for films grown at .

Image of FIG. 3.
FIG. 3.

Optical transmission and reflection spectra for Nb-doped samples grown at different substrate temperatures as labeled. The transmission spectra are normalized vs a bare substrate.

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/content/aip/journal/jap/101/3/10.1063/1.2434005
2007-02-14
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: rf magnetron sputter deposition of transparent conducting Nb-doped TiO2 films on SrTiO3
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/3/10.1063/1.2434005
10.1063/1.2434005
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