Concept of dual-axis micromechanical probe.
Schematic of double cantilever and torsion beams of the dual-axis micromechanical probe. (a) Dimensions of the probe. (b) Torsion angles of the torsion beam and due to the lateral force. Note that the dimensions in the figure are different from the actual ones for clarity.
Schematic of fabrication process. (a) Formation of a tip and a step for the torsion beam. (b) Fabrication of slit-shaped apertures. (c) Substrate etching.
SEM image of a fabricated probe. (a) Micromechanical probe. (b) Groove pattern on the rear side for the optical lever method. (c) Tip on the front side of the probe end.
(Color online) Simultaneous AFM∕FFM images of a magnetic disk taken with a fabricated dual-axis micromechanical probe. The pattern for the optical lever was not fabricated on the probe end. The scan sizes of all the images are . (a) AFM image. (b) FFM image. (c) Position of the optical lever laser spot for FFM measurement shown in (d). (d) FFM image when the optical lever laser was set at the position shown in (c).
(Color online) AFM∕FFM observation of a thin liquid lubricant film on a silicon substrate. The scan sizes of all the images are . (a) Tapping-mode AFM image taken by a commercial probe. Simultaneous contact-mode AFM (b) and FFM (c) images taken by a fabricated micromechanical probe. (d) Cross sectional view on line A-B in (c). (e) Magnified image of the onset of the scan in (d). The schematic double cantilever beams illustrate the deflections at each position.
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