1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Dynamic characterization of nanoelectromechanical oscillators by atomic force microscopy
Rent:
Rent this article for
USD
10.1063/1.2472277
/content/aip/journal/jap/101/4/10.1063/1.2472277
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/4/10.1063/1.2472277
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Oblique angle scanning electron micrographs of (a) arrays of 205 nm thick single crystal silicon suspended cantilever devices. Scale bar corresponds to . Released structures with dimensions of (b) , and (c) , . Scale bar corresponds to .

Image of FIG. 2.
FIG. 2.

Illustration of the experimental apparatus emphasizing the weakly coupled, noncontact, and scanning modes of operation. The red dashed line initiating from the free end of the cantilever structure indicates the length of the AFM scan during tapping mode imaging of the interactions.

Image of FIG. 3.
FIG. 3.

Oblique angle scanning electron micrograph of (a) , single crystal silicon device. (Scale bar corresponds to .) The AFM tapping mode probe is scanned along the dashed line with the slow scan axis in a disabled state. Without excitation , 25 representative line scans for (b) height and (c) phase show stable output signals.

Image of FIG. 4.
FIG. 4.

Tapping mode AFM scans across the piezodriven cantilever between 3.5 and 6.5 MHz. (a) The height image displacement is due to the resonant coupling of the interacting system. (b) Phase contrast and (c) amplitude images show the spectral characteristics of the nanomechanical oscillator. Dashed blue line is a fit to a Lorentzian function.

Image of FIG. 5.
FIG. 5.

Measured frequency spectra of the NEMS cantilever in (a)air and (b)vacuum using optical interferometry and excitation. Lorentzian fitting functions are represented by the solid curves.

Image of FIG. 6.
FIG. 6.

Measured extension-retraction cycle of the probe amplitude vs the -piezo scanner position. This dynamic force curve was obtained with the cantilever driven well below the first eigenfrequency. Two regions, free vibration and contact, along with direction of the extension (black arrow) and retraction (blue arrow) cycles are identified. The vibrational amplitude was highest in the noncontact (free vibration) regime. The insets schematically represent (not to scale) the probe-cantilever interactions at several points along the dynamic force curve.

Image of FIG. 7.
FIG. 7.

Measured vibrational amplitude (open circles) of the probe, near the vicinity of the point of contact, vs drive frequency of the cantilever structure with dimensions and . The two figure insets show zoomed-in amplitude vs piezo position for various points in the spectral curve. The arrows indicate the respective measured spectral data point. The solid blue line is a least square fit using a Lorentzian function. From the Lorentzian fit, the resonant frequency and mechanical quality factor were 2.3 MHz and 4.1, respectively.

Image of FIG. 8.
FIG. 8.

Measured vibrational amplitude (open circles) of the probe, in the free vibration regime (hovering mode), as a function of the drive frequency of the cantilever with dimensions and . The solid line represents a least square fit using a Lorentzian function. The measured resonant frequency and mechanical quality factor were 2.3 MHz and 5.15, respectively.

Image of FIG. 9.
FIG. 9.

Schematic representation highlighting relevant geometric parameters of a vibrating cantilever structure interacting with an AFM probing tip at a separation distance . Typical dimensions in the lateral direction range from to with .

Image of FIG. 10.
FIG. 10.

Simulated resonant curves of the NEMS cantilever for (1) , (2) , (3) , and (4) amplitudes of excitation.

Image of FIG. 11.
FIG. 11.

Displacement time history of the AFM probe interacting with the cantilever for the case of resonant excitation . Time history for different initial separation distances (a) (hovering mode) and (c) (contact mode). (b) and (d) represent zoomed in portions of (a) and (c), respectively. The resonant amplitude of the NEMS cantilever was 78 nm. Thick solid lines in (b) and (d) represent the AFM probe motion, while directly below, the thinner line represents higher frequency NEMS oscillations.

Image of FIG. 12.
FIG. 12.

Displacement time history of the AFM probe driven at resonance and interacting with NEMS cantilever driven at for initial separation distance (a) and (b) , (c) and (d) , and (e) and (f) . The former of the matched pairs shows only the probe deflection, while the latter illustrates the motion of both oscillators. Resonant amplitudes of the AFM probe and of the NEMS cantilever were 15 and 78 nm, respectively. Thick solid lines in (b), (d), and (f) represent the AFM probe motion and the thinner line represents the NEMS oscillations.

Loading

Article metrics loading...

/content/aip/journal/jap/101/4/10.1063/1.2472277
2007-02-23
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dynamic characterization of nanoelectromechanical oscillators by atomic force microscopy
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/4/10.1063/1.2472277
10.1063/1.2472277
SEARCH_EXPAND_ITEM