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The effect of oxygen adsorption on Cu{111} thin film growth stresses
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10.1063/1.2436838
/content/aip/journal/jap/101/5/10.1063/1.2436838
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/5/10.1063/1.2436838
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) A plot of stress-thickness product vs thickness outlining a typical experiment. (1) Cu growth at . (2) growth interruption and oxygen adsorption. (3) Continued growth after was . All subsequent figures show data from region (3).

Image of FIG. 2.
FIG. 2.

(Color online) (a) Plot of stress thickness vs thickness [region (3), Fig. 1] for four different oxygen coverages. (b) A plot of oxygen as a function of the film thickness to reach the steady-state cutoff, shown as points in (a) (defined as ).

Image of FIG. 3.
FIG. 3.

(Color online) (a) Plots of stress thickness and average stress as a function of oxygen coverage. (b) Plot of instantaneous stress as a function of oxygen coverage. Both (a) and (b) are taken at the steady-state stress.

Image of FIG. 4.
FIG. 4.

(Color online) Plot of stress thickness as a function of time. corresponds to the interruption of the growth flux in region (3) of Fig. 1.

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/content/aip/journal/jap/101/5/10.1063/1.2436838
2007-03-06
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The effect of oxygen adsorption on Cu{111} thin film growth stresses
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/5/10.1063/1.2436838
10.1063/1.2436838
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