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Surface nucleation of the plane of excimer laser annealed on substrates: A molecular dynamics study
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View: Figures


Image of FIG. 1.
FIG. 1.

Schematic view of TFT structure (a) and heat flow in the thin films during irradiation of excimer laser (b). Arrows indicate the lateral and vertical heat flow. Excess heat of molten area of flows into the substrates. Panel (b) is drawn on the basis of the experimental process of multishot irradiations (Ref. 15).

Image of FIG. 2.
FIG. 2.

Atomic configurations of system and initial temperature profile of the MD cell. Atomic positions are projected on the direction. The and atoms are represented by white and dark gray, respectively.

Image of FIG. 3.
FIG. 3.

The velocity distributions of atoms at various layers during the cooling process after 15 ps. The solid lines represent the fits of velocity distributions of atoms to Maxwell-Boltzmann distribution function in Ref. 40. The temperatures of , , , and are obtained from the velocity distributions, and the temperatures determined by the averaged kinetic energies are , , , and , respectively.

Image of FIG. 4.
FIG. 4.

Three-dimensional plots of temperature profile during the cooling process. The temperature of zone of MD cell was set at 1700 K and for the other region , the temperature was not controlled: (a) , (b) , and (c) .

Image of FIG. 5.
FIG. 5.

(a) Distribution of the order parameter across the interface and the averaged density profile in the direction. The solid line shows the threshold to distinguish between “crystal-like” and “liquidlike” particles. Atomic configurations of interface system (b) and identified as crystalline atoms (c) are projected on the plane. The interface was prepared by setting the temperature at 1500 K for and 3500 K for of the MD cell, respectively.

Image of FIG. 6.
FIG. 6.

Snapshots of atomic configurations during nucleation and crystallization of on the substrate. These figures were obtained by projecting the atomic configurations identified as crystalline and substrate. The and atoms are represented by white and dark gray, respectively.

Image of FIG. 7.
FIG. 7.

Snapshot of surface atomic configuration at 8.25 ns. Encircled regions indicate the nuclei with plane normal to the substrate of MD cell. Atomic positions are projected on the [001] direction for the top thick region of the MD cell.

Image of FIG. 8.
FIG. 8.

Calculated surface energies of the crystal planes as a function of temperature. The arrows indicate the temperature process for estimating the surface energies of plane. Gray points indicate the surface energy calculated under the elastic hard wall.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface nucleation of the (111) plane of excimer laser annealed Si on SiO2 substrates: A molecular dynamics study