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Impact of the etching gas on vertically oriented single wall and few walled carbon nanotubes by plasma enhanced chemical vapor deposition
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10.1063/1.2654647
/content/aip/journal/jap/101/5/10.1063/1.2654647
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/5/10.1063/1.2654647

Figures

Image of FIG. 1.
FIG. 1.

Cobalt catalyst particles observed by TEM after annealing a thick film at .

Image of FIG. 2.
FIG. 2.

(a) SEM (tilt: 45°; inset, tilt: 90°) and TEM (right hand side) observations of short SWCNT and DWCNT (scale bar: ) grown after of (1:3) plasma discharge at . (b) SEM (tilt: 45°) and TEM (right hand side) observations of MWNT grown after of (1:3) plasma discharge at .

Image of FIG. 3.
FIG. 3.

SEM images of carbon nanostructures synthesized at using with 2:3 ratio after (a) (inset, tilt: 90°) and (b) of the growth process.

Image of FIG. 4.
FIG. 4.

Influence of the grid voltage on CNT structures obtained at after of a discharge. (a) , (b) , and (c) .

Image of FIG. 5.
FIG. 5.

SEM and TEM (inset) images of carbon nanostructures obtained at and using various ratios. (a) 1:4, (b) 1:11, (c) 1:23, and (d) 1:37.

Image of FIG. 6.
FIG. 6.

SEM (tilt: 45°) and TEM (inset) images of carbon nanostructures obtained at and using two ratios (a) 1:11 and (b) 1:23.

Image of FIG. 7.
FIG. 7.

SEM images (tilt: 90°) of FWNT synthesized at (a) using 1:23 at after , (b) the same as (a) after , (c) using 1:11 at after , and (d) the same as (c) after .

Image of FIG. 8.
FIG. 8.

(a) FWNT synthesized with 1:23 at during (SEM—tilt: 45°). Inset: SEM with sample tilted at 90°. (b) MWNT synthesized with 1:11 at for —SEM (tilt: 45°) and TEM images (inset).

Image of FIG. 9.
FIG. 9.

(Color online) Carbon nanotube growth scenario by PECVD.

Tables

Generic image for table
Table I.

Influence of the ratio on carbon nanostructures with fixed grid voltage (-C denotes turbostratic carbon).

Generic image for table
Table II.

Influence of the grid voltage on the carbon nanostructures using (1:3) mixtures (-C denoted the turbostratic carbon).

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/content/aip/journal/jap/101/5/10.1063/1.2654647
2007-03-14
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Impact of the etching gas on vertically oriented single wall and few walled carbon nanotubes by plasma enhanced chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/jap/101/5/10.1063/1.2654647
10.1063/1.2654647
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