RBS spectrum of sample implanted with 3 MeV Au ions to a dose of . The simulated RBS spectrum is also included for comparison. Beyond channel number 500, both spectra have been magnified 50 times and the corresponding scale is shown on the axis on the right hand side.
RBS spectra showing the Au profiles in a sample before and after sequentially annealing in the temperature range of . The dashed line shown indicates the position of the interface.
RBS spectra showing Au profiles in samples before (filled circles) and after direct annealing for (a) 1 h at , (b) 1 h at , and (c) 2 h at . The dashed line shown indicates the position of the interface.
XTEM micrographs showing (a) the microstructure of Au implanted sample annealed directly at for 1 h, with three distinct regions marked as I, II, and III in the regrown Si layer and HRTEM images of (b) region I, i.e, the interfacial region, (c) region II, and (d) region III.
XTEM micrographs showing (a) the microstructure of Au implanted sample annealed directly at for 2 h at a lower magnification, (b) microstructure of the interface, (c) highly aligned bunches of Au-rich nanoparticles extending into deeper regions in Si, (d) Au-rich nanoparticles with trails in the form of dark stripes in the deeper region in Si, and (e) and (f) the microstructure of the deeper region containing Au-rich nanoparticles in addition to dislocations, decorated by Au-rich nanoparticles. The boxes marked in (c)–(f) indicate the distance from the interface while the solid arrows show the direction of surface.
Article metrics loading...
Full text loading...