(a) A diagram of the rectangular aperture fabrication on the laser diode and its orientation relative to the laser. (b)–(d) Examples of FIB images for rectangular apertures having the dimensions indicated in the figure.
Slits viewed in cross section through the procedure described in the text. Slits were made with different procedures: (a) single-pass mode with 2.3 times higher dose compared to the standard used for the narrow apertures; (b) single-pass mode with the standard dose; (c) raster mode with the standard dose used for the wider apertures.
An example of the measurement of aperture differential efficiency (ADE) for a VSAL and the leakage through the metal layer that is subtracted before calculation of the aperture ADE.
Relative through put efficiencies at optical wavelength, of (a) narrow structures and (b) wide structures as a function of aperture length. Substantial improvement in throughput efficiency is observed in the narrower structures due to geometrical resonance.
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