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Measurement of the x-ray dose-dependent glass transition temperature of structured polymer films by x-ray diffraction
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10.1063/1.2752548
/content/aip/journal/jap/102/1/10.1063/1.2752548
http://aip.metastore.ingenta.com/content/aip/journal/jap/102/1/10.1063/1.2752548

Figures

Image of FIG. 1.
FIG. 1.

Cross-sectional SEM image of a PMMA grating. The height of the grating lines is 100 nm and the gap between the grating lines is 50 nm. The period is 100 nm.

Image of FIG. 2.
FIG. 2.

Experimental setup for x-ray diffraction from a grating made by EUV-IL. The distance is 1.5 m. The wavelength of the incoming x-ray beam is 0.146 nm. Two pairs of slits define the beam. An ionization chamber counts the number of photons per second, , on the sample.

Image of FIG. 3.
FIG. 3.

(Color online) Diffraction patterns of a PMMA grating with a period . The temperature was ramped from to . A clear enhancement of the intensities in the diffraction peaks is seen up to the temperature of about . Above the peaks disappear due to a glass transition. Note that the diffraction intensities have been offset for clarity.

Image of FIG. 4.
FIG. 4.

(Color online) The total scattering power of the grating as a function of temperature. Curves are shown for gratings which have been pre-exposed to x rays so as to study the influence of x-ray radiation on the glass transition temperature of PMMA.

Image of FIG. 5.
FIG. 5.

(Color online) The glass temperature as a function of the absorbed x-ray dose. The linear behavior can be explained with a theoretical model for the decrease in PMMA molecular weight as a function of x-ray dose.

Tables

Generic image for table
Table I.

Properties of PMMA (Refs. 37 and 39).

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/content/aip/journal/jap/102/1/10.1063/1.2752548
2007-07-12
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Measurement of the x-ray dose-dependent glass transition temperature of structured polymer films by x-ray diffraction
http://aip.metastore.ingenta.com/content/aip/journal/jap/102/1/10.1063/1.2752548
10.1063/1.2752548
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