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Laser-induced breakdown spectroscopy of trisilane using infrared laser pulses
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10.1063/1.2811870
/content/aip/journal/jap/102/10/10.1063/1.2811870
http://aip.metastore.ingenta.com/content/aip/journal/jap/102/10/10.1063/1.2811870

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic diagram of the experimental setup for laser-induced breakdown diagnostics.

Image of FIG. 2.
FIG. 2.

(Color online) Threshold power density of optical breakdown in trisilane for different pressures. Solid circle: without previous breakdown; open star: with previous breakdown.

Image of FIG. 3.
FIG. 3.

(Color online) Low-resolution LIB emission spectrum observed in the region in trisilane gas at a pressure of , excited by the 10P(20) line at of the laser, and assignment of the atomic lines of Si, , and .

Image of FIG. 4.
FIG. 4.

(Color online) Low-resolution LIB emission spectrum observed in the region in trisilane.

Image of FIG. 5.
FIG. 5.

(Color online) Low-resolution LIB emission spectrum observed in the region in trisilane.

Image of FIG. 6.
FIG. 6.

(Color online) Low-resolution LIB emission spectrum observed in the region in trisilane.

Image of FIG. 7.
FIG. 7.

(Color online) Low-resolution LIB emission spectrum observed in the region in trisilane.

Image of FIG. 8.
FIG. 8.

(Color online) High-resolution LIB emission spectrum observed in the region in trisilane gas at a pressure of , excited by the 10P(20) line at of the laser, and assignment of some atomic lines of Si, , and .

Image of FIG. 9.
FIG. 9.

(Color online) High-resolution LIB emission spectrum observed in the region in trisilane.

Image of FIG. 10.
FIG. 10.

(Color online) High-resolution LIB emission spectrum observed in the region in trisilane.

Image of FIG. 11.
FIG. 11.

(Color online) High-resolution LIB emission spectrum observed in the region in trisilane.

Image of FIG. 12.
FIG. 12.

(Color online) High-resolution LIB emission spectrum observed in the region in trisilane.

Image of FIG. 13.
FIG. 13.

(Color online) High-resolution LIB emission spectrum observed in the region in trisilane.

Image of FIG. 14.
FIG. 14.

(Color online) High-resolution LIB emission spectrum observed in the region in trisilane.

Image of FIG. 15.
FIG. 15.

(Color online) Linear Boltzmann plot for several transition lines used to calculate plasma temperature . Plot also shows linear fit to the data with a regression coefficient of .

Image of FIG. 16.
FIG. 16.

(Color online) Linear Boltzmann plot for several H transition lines used to calculate plasma temperature . Plot also shows linear fit to the data with a regression coefficient of .

Image of FIG. 17.
FIG. 17.

(Color online) Temperature dependence of the ionization degree of silicon (Si-I), silicon singly ionized (Si-II), and silicon doubly ionized (Si-III) at a constant pressure of .

Image of FIG. 18.
FIG. 18.

(Color online) Doppler linewidths for some lines of the hydrogen Balmer series.

Tables

Generic image for table
Table I.

List of hydrogen transition lines and their spectral database (NIST Atomic Spectra Database, 2006) used for plasma temperature calculation.

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/content/aip/journal/jap/102/10/10.1063/1.2811870
2007-11-20
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Laser-induced breakdown spectroscopy of trisilane using infrared CO2 laser pulses
http://aip.metastore.ingenta.com/content/aip/journal/jap/102/10/10.1063/1.2811870
10.1063/1.2811870
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