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Hydrogen concentration and bonding configuration in polycrystalline diamond films: From micro-to nanometric grain size
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10.1063/1.2818372
/content/aip/journal/jap/102/11/10.1063/1.2818372
http://aip.metastore.ingenta.com/content/aip/journal/jap/102/11/10.1063/1.2818372

Figures

Image of FIG. 1.
FIG. 1.

HR-SEM micrographs of as-deposited HF CVD diamond films: (a) film deposited from gas mixture for (thickness of , grain size of ) and (b) film deposited from gas mixture for (thickness of , grain size of ).

Image of FIG. 2.
FIG. 2.

(Color online) SIMS profile of hydrogen atoms within three different types of diamond films. (a) HF CVD film deposited from gas mixture for . Note the decrease of H concentration from at initial growth region (grain size of ) to for thicker film (grain size of ). (b) thick nanodiamond film deposited by dc GD CVD. The hydrogen concentration increases from at the initial stage of film evolution (predominantly graphitic precursor) up to in the region where sized nanodiamond grains are embedded in an amorphous carbon matrix. (c) MW CVD diamond film with grain size of . (d) MW CVD diamond film with grain size in the range of .

Image of FIG. 3.
FIG. 3.

Raman spectra of the different diamond samples. (a) MW CVD sample with grain size of . (b) MW CVD sample with grain size of . (c) HF CVD diamond film deposited for ( grain size). (d) HF CVD diamond film deposited for ( grain size). (e) dc GD CVD diamond film deposited for ( grain size).

Image of FIG. 4.
FIG. 4.

(a) HR-EEL spectra of as-deposited HF CVD films as a function of annealing temperature. The primary electron energy was and FWHM of elastic peak was . The shape of the spectrum is nearly unchanged up to . The results in complete hydrogen desorption (the absence of peak) alongside with appearance of dimer mode at . (b) Detailed analysis of HR-EELS stretching mode of as-deposited HF CVD diamond film [data were taken from spectrum (a)]. Peak fitting procedure reveals three different contributions at , , and energy losses.

Image of FIG. 5.
FIG. 5.

EEL spectra of HF CVD diamond films as a function of annealing temperature. Primary electron energy . The shape of the spectrum is nearly unchanged up to annealing temperature , while results in appearance of the graphitic associated plasmon at . Note the correlation of this graphitic feature with hydrogen desorption detected by HR-EEL spectroscopy.

Image of FIG. 6.
FIG. 6.

EEL spectra of MW CVD nanodiamond film with grain size of . The primary electron energy . (a) As-deposited sample annealed to . (b) Ex situ MW-H terminated sample annealed to . Note the enhancement of diamond surface plasmon at energy loss of following ex situ MW hydrogenation.

Image of FIG. 7.
FIG. 7.

HR-EEL spectra of MW CVD deposited nanodiamond films. (a) As-received sample annealed to . (b) As-deposited sample following MW-H treatment for and subsequent annealing to . (c) Followed further annealing to . [(d) and (e)] Detailed analysis of HR-EELS stretching mode [data originated from spectra (a) and (b)].

Image of FIG. 8.
FIG. 8.

Comparison of HR-EEL spectra of three different diamond films which underwent MW-H treatment: (a) HF CVD film grown for (grain size of ), (b) nanodiamond film grown by dc GD method (grain size of ), and (c) MW CVD sample (grain size of ). Note the different ratios of associated modes relative to vibrations.

Tables

Generic image for table
Table I.

Summary of grain sizes and deposition methods of the investigated diamond films.

Generic image for table
Table II.

Hydrogen concentration vs the crystalline size and the surface to volume atom ratio.

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/content/aip/journal/jap/102/11/10.1063/1.2818372
2007-12-07
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hydrogen concentration and bonding configuration in polycrystalline diamond films: From micro-to nanometric grain size
http://aip.metastore.ingenta.com/content/aip/journal/jap/102/11/10.1063/1.2818372
10.1063/1.2818372
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