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Oxygen species in films: An in situ x-ray photoelectron spectroscopy study
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10.1063/1.2759198
/content/aip/journal/jap/102/2/10.1063/1.2759198
http://aip.metastore.ingenta.com/content/aip/journal/jap/102/2/10.1063/1.2759198

Figures

Image of FIG. 1.
FIG. 1.

spectra (symbols) and peak fitting (lines) for the sample measured at and take-off angles, either before or after water vapor exposure. Gray-filled peaks correspond to and percentages are relative intensities.

Image of FIG. 2.
FIG. 2.

(a) Linear fitting (solid lines) and experimental (symbols) relative intensities before water vapor exposure as a function of for the different applied processes. (b) Intercepts and (c) slopes derived from the linear fitting in (a).

Image of FIG. 3.
FIG. 3.

(a) Linear fitting (solid lines) and experimental differences (symbols) between relative intensities after and before water vapor exposure as a function of for the different applied processes. (b) Intercepts and (c) slopes derived from the linear fitting in (a).

Image of FIG. 4.
FIG. 4.

(a) spectra for the different samples before water exposure. (b) spectrum (symbols) and peak fitting (lines) for the sample. The gray-filled peak is a modeled contribution of (relative O concentration) Si-O bonds in . Spectra from (a) and (b) were taken at photoelectron take-off.

Image of FIG. 5.
FIG. 5.

(a) GIXRD patterns for the different applied processes. Vertical bars correspond to and peak positions. (b) HRTEM cross-section image of the -only sample. Characteristic grain dimension is marked.

Image of FIG. 6.
FIG. 6.

FWHM for the different applied processes and spectrum for the sample (inset). Measurements were performed before water vapor exposures, at photoelectron take-off.

Tables

Generic image for table
Table I.

Processes applied for the different samples.

Generic image for table
Table II.

Conversion factors from linear fitting coefficients to amounts.

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/content/aip/journal/jap/102/2/10.1063/1.2759198
2007-07-25
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Oxygen species in HfO2 films: An in situ x-ray photoelectron spectroscopy study
http://aip.metastore.ingenta.com/content/aip/journal/jap/102/2/10.1063/1.2759198
10.1063/1.2759198
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