Schematic of the first Lloyd mirror interferometer.
Schematic of the second Lloyd mirror interferometer.
Dependence of the aerial fringe visibility on the half-pitch dimension calculated for the first (solid line) and the second (empty triangles) Lloyd mirror interferometers, assuming .
Limitations on the maximum number of fringes vs the half pitch imposed by the temporal coherence length of (solid line) and by different values of the spatial coherence length: (dotted line), (dashed line), and (crossed line).
Dependence of the vertical modulation of patterns with a half pitch of on the illumination dose.
SEM images of patterns impressed with the first Lloyd mirror configuration having the half pitch of . The patterns were obtained with (a) (single laser shot) and (b) (20 laser shots).
AFM images and corresponding plot profiles of half-pitch structures printed with the first (a) and the second (b) Lloyd mirror configurations, respectively.
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