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Spatial structure of a slot-antenna excited microwave plasma source
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10.1063/1.2926551
/content/aip/journal/jap/103/10/10.1063/1.2926551
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/10/10.1063/1.2926551
/content/aip/journal/jap/103/10/10.1063/1.2926551
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/content/aip/journal/jap/103/10/10.1063/1.2926551
2008-05-23
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spatial structure of a slot-antenna excited microwave N2–Ar plasma source
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/10/10.1063/1.2926551
10.1063/1.2926551
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