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Influence of the chemical and electronic structure on the electrical behavior of zirconium oxynitride films
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10.1063/1.2927494
/content/aip/journal/jap/103/10/10.1063/1.2927494
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/10/10.1063/1.2927494
/content/aip/journal/jap/103/10/10.1063/1.2927494
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/content/aip/journal/jap/103/10/10.1063/1.2927494
2008-05-27
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of the chemical and electronic structure on the electrical behavior of zirconium oxynitride films
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/10/10.1063/1.2927494
10.1063/1.2927494
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