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Roles of oxidizing species in a nonequilibrium atmospheric-pressure pulsed remote plasma glass cleaning process
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10.1063/1.2830982
/content/aip/journal/jap/103/2/10.1063/1.2830982
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/2/10.1063/1.2830982
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic side- and top views of sample pallets A and B.

Image of FIG. 2.
FIG. 2.

Schematic illustration of the optical emission spectroscopy system.

Image of FIG. 3.
FIG. 3.

Schematic side view of the atmospheric-pressure pulsed plasma system and vacuum ultraviolet laser absorption spectroscopy system.

Image of FIG. 4.
FIG. 4.

Schematic illustration of the measurement area using 2D optical emission spectroscopy.

Image of FIG. 5.
FIG. 5.

Characteristics of the chemical composition (C/O/N) on the surface of the glass and the contact angles before and after plasma treatments at the mixing ratios of , , , , and .

Image of FIG. 6.
FIG. 6.

Contact angles as a function of the flow rate ratio, after plasma treatment using sample pallets A and B.

Image of FIG. 7.
FIG. 7.

Optical emission spectrum of N in the plasma between the electrodes (a), and the OES intensity of N as a function of the flow rate ratio (b).

Image of FIG. 8.
FIG. 8.

Optical emission spectrum of in the remote plasma (a), and the OES intensity of as a function of the flow rate ratio (b).

Image of FIG. 9.
FIG. 9.

Optical emission spectrum in the UV region for the plasma between the electrodes (a) and the OES intensities of and as a function of the flow rate ratio (b).

Image of FIG. 10.
FIG. 10.

Optical emission spectrum in the UV region for the remote plasma (a) and the OES intensities of and as a function of the flow rate ratio (b).

Image of FIG. 11.
FIG. 11.

Concentration of as a function of the flow rate ratio.

Image of FIG. 12.
FIG. 12.

Concentration of as a function of the flow rate ratio.

Image of FIG. 13.
FIG. 13.

2D distributions of the OES intensity of in the remote plasma region at mixing ratios of , , , , , , , , and .

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/content/aip/journal/jap/103/2/10.1063/1.2830982
2008-01-17
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Roles of oxidizing species in a nonequilibrium atmospheric-pressure pulsed remote O2/N2 plasma glass cleaning process
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/2/10.1063/1.2830982
10.1063/1.2830982
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