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Ellipsometric in situ measurement of oxidation kinetics and thickness of (C2–C20) alkylsilyl (sub)monolayers
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View: Figures


Image of FIG. 1.
FIG. 1.

Experimental setup for in situ and real-time spectroscopic ellipsometry and FTIR spectroscopy.

Image of FIG. 2.
FIG. 2.

Investigated terminations (a) dimethylsilyl, (b) trimethylsilyl, and (c) alkylsilyl groups containing different numbers of methylene groups made from occtadecyldimethylchlorosilane, and (d) octadecylsilyl terminations prepared from octadecyltrichlorsilane [C8 and C18 SAMs].

Image of FIG. 3.
FIG. 3.

Fitting error and test of the stability of the ellipsometer with time. The first point was taken as a reference to calculate the effective optical properties of the substrate. The model presented in the inset was used to fit the points. Since the surface was not terminated the thickness of the film characterized by the Cauchy dispersion model should be zero.

Image of FIG. 4.
FIG. 4.

Experimentally measured ellipsometric angles (a) and (b) before (closed symbols) and after (open symbols) layer oxidation for ODS (squares) and DMS (circles). Zooms of some parts of the graphs are presented as insets. In some spectral regions the reference measurements did not coincide with previous measurements of the reference if the sample was removed between experiments (open triangles).

Image of FIG. 5.
FIG. 5.

Differences between the measured ellipsometric angles before and after the oxidation process for alkylsilyl terminations. Squares represent experimentally measured points and solid lines indicate data simulated with a Cauchy dispersion model.

Image of FIG. 6.
FIG. 6.

Changes of the layer thickness during laser-induced oxidation for the DMS termination, divided into stages I–VI.

Image of FIG. 7.
FIG. 7.

(a) Change of the layer thickness measured for alkylsilyl chains with different numbers of methylene units during oxidation. (b) The effective thickness of alkylsilyl terminations vs number of methylene groups in the chain. The error bars indicate the statistical error. The line represents a linear fit, which yields an increment of per methylene group.

Image of FIG. 8.
FIG. 8.

Decay of relative film thickness for several alkylsilyl terminations with a different number of units in logarithmic scale vs oxidation time. The rate coefficients were determined from the linear fits indicated in the figure.

Image of FIG. 9.
FIG. 9.

Single-reflection FTIR spectra of hydrocarbon layers on oxide-covered silicon. Spectra recorded before the photoinduced oxidation were divided by spectra recorded after oxidation. (a) Several FTIR survey spectra are presented as measured; (b) FTIR spectra of alkylsilyl chains with different chain lengths . The spectra are shifted vertically for clarity. (c) FTIR spectra of TMS and DMS layers.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ellipsometric in situ measurement of oxidation kinetics and thickness of (C2–C20) alkylsilyl (sub)monolayers