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Microstructure and dislocation of epitaxial InN films revealed by high resolution x-ray diffraction
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10.1063/1.2832753
/content/aip/journal/jap/103/2/10.1063/1.2832753
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/2/10.1063/1.2832753
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Illustration of a mosaic layer structure with the correlation lengths, tilt, and twist features and the shape of the scattering in reciprocal space are contribution from the microscopic tilt distribution (black ellipse) and lateral correlation length (gray ellipse). (b) A schematic of a reciprocal space map shows the full-width at half-maximum intensity of the overall ellipse is contributed from the lateral finite sizes and the microscopic tilts .

Image of FIG. 2.
FIG. 2.

Williamson–Hall plots for MBE- and MOCVD-grown InN films. Triple-axis scans were measured for reflections indicated. The straight lines are linear fitting.

Image of FIG. 3.
FIG. 3.

Williamson–Hall plots for MBE and MOCVD-grown InN films. Triple-axis scans were measured for reflections indicated. The straight lines are linear fitting.

Image of FIG. 4.
FIG. 4.

The (105) reciprocal space map of MBE-grown InN (a), MBE-grown InN (b). The straight lines are used for measuring the FWHMs of the overall ellipse.

Image of FIG. 5.
FIG. 5.

The FWHMs of asymmetric plane as a function of inclination angle. The dashed lines are least-square fits for extrapolating the twist angle.

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/content/aip/journal/jap/103/2/10.1063/1.2832753
2008-01-17
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microstructure and dislocation of epitaxial InN films revealed by high resolution x-ray diffraction
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/2/10.1063/1.2832753
10.1063/1.2832753
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