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(a) Compression apparatus and (b) a pattern of STI blocks in a junction.
ENEXSS stress plot of -axis stresses for (a) ; (b) ; and (c) cases. Note that the tensile region increases with distance between adjacent STI trenches.
Reverse bias leakage currents of the broadest diode plotted as a function of (a) reverse bias and (b) uniaxial compression along the direction.
Measured coefficients as a function of the tensile region/total region ratio in the test structures.
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