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Interface engineering for high interfacial strength between SiCOH and porous SiCOH interconnect dielectrics and diffusion caps
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10.1063/1.2844483
/content/aip/journal/jap/103/5/10.1063/1.2844483
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/5/10.1063/1.2844483
/content/aip/journal/jap/103/5/10.1063/1.2844483
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/content/aip/journal/jap/103/5/10.1063/1.2844483
2008-03-07
2014-10-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Interface engineering for high interfacial strength between SiCOH and porous SiCOH interconnect dielectrics and diffusion caps
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/5/10.1063/1.2844483
10.1063/1.2844483
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