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A method to retrieve optical and geometrical characteristics of three layer waveguides from -lines measurements
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10.1063/1.2885147
/content/aip/journal/jap/103/6/10.1063/1.2885147
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/6/10.1063/1.2885147

Figures

Image of FIG. 1.
FIG. 1.

Three layer waveguide.

Image of FIG. 2.
FIG. 2.

Algorithm of the resolution of the system of six equations in six unknowns and measured modes.

Image of FIG. 3.
FIG. 3.

Algorithm of the -lines spectra analysis.

Image of FIG. 4.
FIG. 4.

Distribution of errors on the parameter .

Image of FIG. 5.
FIG. 5.

Distribution of the uncertainties over all the simulated guides, fitted by a lognormal law.

Image of FIG. 6.
FIG. 6.

Evolution of the error on the refractive indices as a function of the noise on the synchronous angles.

Image of FIG. 7.
FIG. 7.

Evolution of the error on the thicknesses as a function of the noise on the synchronous angles.

Image of FIG. 8.
FIG. 8.

Evolution of the error on the refractive indices as a function of the number of synchronous angles used in the resolution.

Image of FIG. 9.
FIG. 9.

Evolution of the error on the thicknesses as a function of the number of synchronous angles used in the resolution.

Image of FIG. 10.
FIG. 10.

SEM photograph of a three layer waveguide.

Image of FIG. 11.
FIG. 11.

-lines spectrum obtained with sample measured at 29 mm from the center of deposition.

Image of FIG. 12.
FIG. 12.

Evolution of the thicknesses of the different layers of the three layer samples , (: ◻, : ◯, : ▵) and the two layer samples , (: ◼, : ●).

Image of FIG. 13.
FIG. 13.

Evolution of the refractive indices of the different layers of the three layer samples , (: ◻, : ◯, : ▵) and the two layer samples , (: ◼, : ●).

Tables

Generic image for table
Table I.

Range of parameters explored with the statistical study.

Generic image for table
Table II.

Comparison of the measured characteristics of a waveguide (sample ), before and after the deposition of the upper cladding layer.

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/content/aip/journal/jap/103/6/10.1063/1.2885147
2008-03-31
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A method to retrieve optical and geometrical characteristics of three layer waveguides from m-lines measurements
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/6/10.1063/1.2885147
10.1063/1.2885147
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