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Characterization of polycrystalline films deposited from the precursors 1,3-disilabutane and dichlorosilane
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10.1063/1.2907871
/content/aip/journal/jap/103/8/10.1063/1.2907871
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/8/10.1063/1.2907871
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Silicon to carbon ratio vs DCS fraction.

Image of FIG. 2.
FIG. 2.

Thin film XRD spectra of SiC films deposited with (a) no DCS, (b) 0.10 DCS fraction, (c) 0.14 DCS fraction, (d) 0.16 DCS fraction, (e) 0.18 DCS fraction, (f) 0.31 DCS fraction, and (g) 0.47 DCS fraction.

Image of FIG. 3.
FIG. 3.

Plane view SEM images of SiC films deposited with (a) no DCS, (b) 0.10 DCS fraction, (c) 0.14 DCS fraction, (d) 0.16 DCS fraction, (e) 0.18 DCS fraction, (f) 0.31 DCS fraction, and (g) 0.47 DCS fraction.

Image of FIG. 4.
FIG. 4.

AFM images of SiC films deposited with (a) no DCS, -scale of , (b) 0.10 DCS fraction, -scale of , (c) 0.14 DCS fraction, -scale of , (d) 0.16 DCS fraction, -scale of , (e) 0.18 DCS fraction, -scale of , (f) 0.31 DCS fraction, -scale of , and (g) 0.47 DCS fraction, -scale of .

Image of FIG. 5.
FIG. 5.

rms surface roughness as a function of DCS fraction.

Image of FIG. 6.
FIG. 6.

Plane view exposed grain size vs DCS fraction.

Image of FIG. 7.
FIG. 7.

Cross-section TEM images for SiC films deposited with no DCS [(a) BF image, (b) DF image, and (c) SAD pattern], 0.18 DCS fraction [(d) BF image, (e) DF image, and (f) SAD pattern], 0.31 DCS fraction [(g) BF image, (h) DF image, and (i) SAD pattern], and 0.47 DCS fraction [(j) BF image, (k) DF image, and (l) SAD pattern].

Image of FIG. 8.
FIG. 8.

Residual stress vs DCS fraction (◇) experimental, (- - -) model with grain sizes from AFM, and (—) model with grain sizes from DCS fractions less than 0.16 replaced by .

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/content/aip/journal/jap/103/8/10.1063/1.2907871
2008-04-24
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization of polycrystalline 3C-SiC films deposited from the precursors 1,3-disilabutane and dichlorosilane
http://aip.metastore.ingenta.com/content/aip/journal/jap/103/8/10.1063/1.2907871
10.1063/1.2907871
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