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Reflectance analysis of a multilayer one-dimensional porous silicon structure: Theory and experiment
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10.1063/1.2949265
/content/aip/journal/jap/104/1/10.1063/1.2949265
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/1/10.1063/1.2949265

Figures

Image of FIG. 1.
FIG. 1.

Coordinate system used in the reflectance analysis.

Image of FIG. 2.
FIG. 2.

(a) A schematic diagram of the investigated structure with 5.5 pair Bragg mirror above and 6 pair Bragg mirror below the defect layer, (b) the SEM image of the fabricated structure, and (c) the measured reflectance from spectrophotometer with 6° angle of incidence using unpolarized light.

Image of FIG. 3.
FIG. 3.

The measured reflectance at 6° angle of incidence compared to the optimized theoretical reflectance.

Image of FIG. 4.
FIG. 4.

The measured reflectance at 6° angle of incidence compared to the theoretical reflectance. In (a) the resolution of the spectrophotometer is taken into account by convolving the theoretical curve with FWHM Gaussian whereas in (b) both resolution of the spectrophotometer and the variations in the layer thicknesses at the incident light spot are included.

Image of FIG. 5.
FIG. 5.

The reflectance measured by ellipsometry using (a) -polarized and (b) -polarized light as a function of the wavelength with three different angles of incidence. The corresponding theoretical curves are shown in (c) and (d), respectively.

Tables

Generic image for table
Table I.

Targeted, experimentally observed and numerically optimized values for the thicknesses and porosities.

Generic image for table
Table II.

A comparison of the resonance wavelengths and the splitting of the resonance wavelengths between two different polarizations for experimental and theoretical (anisotropic and isotropic) curves.

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/content/aip/journal/jap/104/1/10.1063/1.2949265
2008-07-02
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reflectance analysis of a multilayer one-dimensional porous silicon structure: Theory and experiment
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/1/10.1063/1.2949265
10.1063/1.2949265
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