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-rich deposition conditions and growth mechanism of tetrahedral amorphous carbon films deposited using filtered arc
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10.1063/1.2951588
/content/aip/journal/jap/104/1/10.1063/1.2951588
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/1/10.1063/1.2951588

Figures

Image of FIG. 1.
FIG. 1.

Hardness and Young’s modulus of ta-C films as functions of the negative substrate bias. The error bars were derived from the average value of ten unattached measurements.

Image of FIG. 2.
FIG. 2.

The Raman spectra of the ta-C films deposited at the different substrate bias. The spectra were fitted with a single skew Lorentzian line shape and the solid smooth lines agreed perfectly with the measured data.

Image of FIG. 3.
FIG. 3.

The fitted spectral parameters of the Raman spectra of the ta-C films deposited at different substrate bias voltages. (a) The coupling coefficients as a function of the substrate bias. (b) The half width as a function of the substrate bias.

Image of FIG. 4.
FIG. 4.

The C core level observed as a function of the negative substrate bias. The component for C–O bonding is omitted.

Image of FIG. 5.
FIG. 5.

The hybridization content derived from the fitted C photoemission spectra of the films as a function of the negative bias.

Image of FIG. 6.
FIG. 6.

The peak position for C photoelectron spectra of the films as a function of (a) the negative substrate bias and (b) the carbon atom concentration.

Image of FIG. 7.
FIG. 7.

The FWHM for C photoelectron spectra of the films as a function of the negative substrate bias.

Image of FIG. 8.
FIG. 8.

Comparison of -edge spectra for the ta-C films deposited at the different bias values.

Image of FIG. 9.
FIG. 9.

The fraction measured using EELS as a function of the substrate bias.

Image of FIG. 10.
FIG. 10.

XRR profiles from the ta-C films deposited at various bias voltages. The arrow lines indicating the critical angle are just a guide.

Image of FIG. 11.
FIG. 11.

The density of ta-C films as a function of the negative substrate bias.

Image of FIG. 12.
FIG. 12.

The sandwich distribution of the density of ta-C films deposited at different bias values. The surface layer and the interface region near the substrate have lower mass density than the bulk layer.

Tables

Generic image for table
Table I.

Roughness, density, and thickness fitting results of ta-C films.

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/content/aip/journal/jap/104/1/10.1063/1.2951588
2008-07-07
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: sp3-rich deposition conditions and growth mechanism of tetrahedral amorphous carbon films deposited using filtered arc
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/1/10.1063/1.2951588
10.1063/1.2951588
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