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Submicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures
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10.1063/1.2952044
/content/aip/journal/jap/104/1/10.1063/1.2952044
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/1/10.1063/1.2952044
/content/aip/journal/jap/104/1/10.1063/1.2952044
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/content/aip/journal/jap/104/1/10.1063/1.2952044
2008-07-14
2014-08-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Submicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/1/10.1063/1.2952044
10.1063/1.2952044
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