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Detection of Si nanoclusters by x-ray scattering during silicon film deposition by mesoplasma chemical vapor deposition
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10.1063/1.2956692
/content/aip/journal/jap/104/1/10.1063/1.2956692
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/1/10.1063/1.2956692
/content/aip/journal/jap/104/1/10.1063/1.2956692
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/content/aip/journal/jap/104/1/10.1063/1.2956692
2008-07-15
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Detection of Si nanoclusters by x-ray scattering during silicon film deposition by mesoplasma chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/jap/104/1/10.1063/1.2956692
10.1063/1.2956692
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