Topography (left) and current (right) images of AZO thin films with (a) , (b) , (c) , (d) , and (e) substrate temperatures. The AZO was biased to and the tip was grounded.
Variations in the rms roughness values analyzed from the topography image (measured by AFM scanning of a area) as a function of the substrate temperatures.
Histograms of the current distribution for the five current images in Fig. 1.
(a) Al-dopant concentration and (b) percentage coverage of conducting regions on AZO surface as a function of substrate temperature.
Topography (left) and CPD images (right) of AZO thin films with (a) , (b) , (c) , (d) , and (e) substrate temperatures. The CPD images have been dealt with the flatten analysis.
(a) concentration and (b) mean WF value on AZO surface dependence on substrate temperature.
XPS measurements for AZO films with different substrate temperatures.
rms roughness values, percentages of conducting region, and mean WF values on AZO surface under different substrate temperature.
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